In this work, we propose a novel method to increase the quality factor of extensional mode micromechanical resonators. The proposed resonator topology is suitable for integration in a silicon-based ...

A micromechanical 13.1 MHz bulk acoustic mode (BAW) silicon resonator is demonstrated. The vibration mode can be characterized as a 2-D plate expansion that preserves the original square shape. The ...

Thomas S. Kuhn The Structure Of Scientific Revolutions by Thomas S kuhn Publication date 1990 Usage Public Domain Mark 1.0 Topics Science Collection folkscanomy_philosophy; folkscanomy; ...

Various supraparticles have been extensively studied owing to their excellent catalytic properties that are attributed to their inherent porous structure; however, their mechanical properties have not ...

We report the results of back-action evading experiments utilizing a tightly coupled electro-mechanical system formed by a radio frequency micromechanical resonator parametrically coupled to a NbTiN ...