Extreme ultraviolet lithography (EUVL) has emerged as a cornerstone technology in the semiconductor industry, enabling the production of devices with sub-10 nm feature sizes. By utilising a 13.5 nm ...

Researchers in the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) and the Faculty of Arts and ...

This article presents a method for developing elastic nanoarchitected metamaterials with tunable optical responses.

Building an integrated circuit (IC) requires various physical and chemical processes to be performed on a semiconductor (e.g., silicon) substrate. Millions of transistors can be fabricated and wired ...

Caltech scientists have developed a way to guide light on silicon wafers with low signal loss approaching that of optical fiber at visible wavelengths. This accomplishment paves the way for a new ...

Researchers review AI-powered inverse lithography, showing how deep learning boosts chip patterning precision and efficiency while facing scaling challenges. Computational lithography optimizes the ...

Few would expect the future of artificial intelligence (AI) to depend on Eindhoven, a quiet Dutch town. Yet just beyond its borders sits the headquarters of ASML, the only company that makes the ...

Canon launched its Nanoimprint Lithography semiconductor manufacturing equipment, which has the potential to compete with ASML's EUV technology currently in production at 4nm. Canon's first planned ...

Canon has developed a new approach to lithography that reduces costs and energy consumption compared to ASML's EUV systems. Canon's new nanoimprint lithography machine imprints circuit patterns "like ...

How Does EUV Lithography Work? EUV Lithography is a state-of-the-art technology in chip manufacturing that uses highly energetic ultraviolet light to carve detailed patterns onto semiconductor ...

"Image" is everything in the $20 billion market for AR/VR glasses. Consumers are looking for glasses that are compact and easy to wear, delivering high-quality imagery with socially acceptable optics ...