The confocal sputtering technique involves the arrangement of magnetrons inside a vacuum chamber so that it is possible to apply multiple materials onto the substrate without breaking vacuum. This ...

There exists a misconception that cathodes are always negative, but, in fact, a cathode's polarity mainly depends on the device type, and can even vary according to the mode of operation as per the ...

Grove first observed sputtering in a dc gas discharge tube in 1852. He discovered that the cathode surface of the discharge tube was sputtered by energetic ions in the gas discharge, and cathode ...

THE cathodic sputtering process has been almost completely replaced in recent years by the vacuum evaporation technique for the production of thin solid films. However, renewed interest in the ...

Sputtering is a well-known physical vapor deposition (PVD) method finding use in several product applications. While commercial sputter systems are designed for large scale production volume of proven ...