Atomic layer etching (ALE) and atomic layer deposition (ALD) represent pivotal techniques in nanofabrication, enabling control of material removal and growth at the atomic scale. By utilising ...
Continuous downscaling of the critical dimensions in semiconductor devices is the cornerstone of technological revolution. As the technology nodes keep shrinking, innovations in fabrication ...
A large-scale (4-inch), highly uniform, and defect-free plasma etching technology, which will likely become the foundation of the industrial supply of molybdenum disulfide (MoSâ‚‚), a next-generation ...
Notably, these properties can be maintained even at the atomic scale. Meanwhile, these properties also pose challenges in achieving highly precise and smooth etching of HFO2 films. Now, a group of ...
In this interview, AZoM talks to Bas Derksema about advancements in plasma etching and deposition processes for compound semiconductor materials applications. Please could you introduce yourself and ...
LUND, Sweden, Sept. 13, 2022 /PRNewswire/ -- AlixLabs from Lund, Sweden, has developed a new, innovative method for manufacturing semiconductor components with a high degree of packing, eliminating ...
The process comprises a surface nitrogenation step via N + ion bombardment, followed by O 2 plasma treatment to form volatile etching byproducts. This approach enables subatomic-level etching ...
The College of Engineering’s Class 1,000 Davidson Foundation Cleanroom provides 2,937 square feet of filtered space available for faculty and industry research as well as workforce development. This ...
Silicon carbide is for photonic circuits and quantum devices. Atomic layer processing boosts SiC waveguides and resonators, improving performance. (Nanowerk News) Quantum systems are the rising stars ...
Lam Research Corporation LRCX continues to ride strong momentum in its systems business, driven by customer demand for its advanced deposition and etch tools. In the third quarter of fiscal 2025, ...
Artificial-intelligence workloads are pushing semiconductor design to a point where traditional scaling strategies are running out of room. Performance improvements that once came from shrinking ...